ETC Plasma Trap Superior Scrubber Performance for :
PECVD and LPCVD Nitride,TEOS and PSG/BPSG.
PECVD α-Si, SiC and LPCVD Poly Si.
LPCVD W and W Silicide.
MOCVD and LPCVD GaAS.
MOCVD Al. and MOCVD Cu.
PH3 Annealing.
PFC Abatement.